ga»Æ½ð¼×ƽ̨

ǿǿÁªÊÖ£¡ga»Æ½ð¼×ƽ̨ÕýʽÉÏÏßICMtia½áºÏ·ÖÎö¼ì.²âÓë¼¼ÊõºÏ×÷·þÎñƽ̨

ËùÊô·ÖÀࣺ ýÌ屨·

°ä²¼¹¦·ò£º 2020-05-12

¸ÅÒª£º 2020Äê5ÔÂ11ÈÕÆð £¬£¬£¬£¬£¬£¬£¬½áºÏ·ÖÎö¼ì.²âÓë¼¼ÊõºÏ×÷·þÎñƽ̨(ÒÔϼò³Æ£º·þÎñƽ̨)ÕýʽÔÚICMtia(¼¯³Éµç·×ÊÁϲúÒµ¼¼Êõ´´ÐÂÁªÃË)¹ÙÍøÔËÐÐʹÓᣡ£¡£¡£¡£¡£

 

 

¡¡¡¡2020Äê5ÔÂ11ÈÕÆð £¬£¬£¬£¬£¬£¬£¬½áºÏ·ÖÎö¼ì.²âÓë¼¼ÊõºÏ×÷·þÎñƽ̨(ÒÔϼò³Æ£º·þÎñƽ̨)ÕýʽÔÚICMtia(¼¯³Éµç·×ÊÁϲúÒµ¼¼Êõ´´ÐÂÁªÃË)¹ÙÍøÔËÐÐʹÓᣡ£¡£¡£¡£¡£

?

£¨µã»÷ÎÄÕÂÏ·½¡°ÔĶÁÔ­ÎÄ¡±Ö±´ïÆ½Ì¨Ò³Ãæ£©

 

¡¡¡¡·þÎñƽ̨ÊÇ×ÊÁÏÁªÃËǣͷ £¬£¬£¬£¬£¬£¬£¬¶à¶à¹²½¨µ¥Ôª»ý¼«²Î¼Ó½¨ÉèµÄר.Òµ»¯·þÎñƽ̨ £¬£¬£¬£¬£¬£¬£¬·þÎñƽ̨×ÅÁ¦ÓÚÍøÂç¡¢°ä²¼ÁªÃ˳ÉÔ±ËùÊôÒÇÆ÷¡¢É豸µÈ×ÊÔ´ £¬£¬£¬£¬£¬£¬£¬ÒÔÇóÍÆ¶¯¹úÄÚ°ëµ¼ÌåÐÐÒµ¼¼Êõ´´Ð·¢Õ¹¡£¡£¡£¡£¡£¡£

 

 

¡¡¡¡ga»Æ½ð¼×ƽ̨×÷Ϊ¹úÄÚCMPÅ×¹âµæÁìÓòµÄÁúÍ·ÆóÒµ¡¢×ÊÁÏÁªÃË»áÔ±µ¥Ôª £¬£¬£¬£¬£¬£¬£¬ÆìÏ¿عÉ×Ó¹«Ë¾ºþ±±¶¦»ã΢µç×Ó×ÊÁÏÓÐÏÞ¹«Ë¾¶Ô´Ë»ý¼«ÏìÓ¦¡£¡£¡£¡£¡£¡£

¡¡¡¡ºþ±±¶¦»ã΢µç×Ó×ÊÁÏÓÐÏÞ¹«Ë¾ÊǹúÄÚΨ.һȫÔì³ÌCMPÅ×¹âµæ¹©¸øÉÌ £¬£¬£¬£¬£¬£¬£¬¹úÄÚΨ.Ò»Õ¼Óйؼü½½×¢¹¤ÒÕ¼¼ÊõµÄ³§¼Ò £¬£¬£¬£¬£¬£¬£¬Õ¼Óйú.¼Ê»¯Ñз¢ºÍ³ö²úÍŶӡ¢ÊÀ.½ç¼¶ÏȽø½ø¿Ú³ö²úÉ豸 £¬£¬£¬£¬£¬£¬£¬¸ß³ß¶ÈµÄÎÞ³¾³ö²ú³µ¼ä¼°¹úÄÚΨ.Ò»200mmºÍ300mm CMP Pad ÆÀ¼Û³¢ÊÔÊÒ £¬£¬£¬£¬£¬£¬£¬½¨³ÉÁËÓë¹ú.¼ÊÒ».Á÷³§ÉÌͬ²½µÄ×Ô¶¯»¯CMPÅ×¹âµæ²úÒµ»¯³ö²úÏß¡£¡£¡£¡£¡£¡£¹«Ë¾¾ß±¸ÁË׳´óµÄ×ÔÖ÷Ñз¢¡¢´´Ðº͹¤³Ì²úÒµ»¯ÄÜÁ¦ £¬£¬£¬£¬£¬£¬£¬²úÆ·ÓкÏÓÃÓÚOxide¡¢W¡¢Cu bulk¡¢ÒÔ¼°BarrierÉϺÏÓõÄCMP Pad;ͬʱ £¬£¬£¬£¬£¬£¬£¬¹«Ë¾Õ¼ÓÐ׳´óµÄ¿ÍÔ컯ÄÜÁ¦ £¬£¬£¬£¬£¬£¬£¬¿Éƾ¾Ý¿Í»§ÐèÒª¶¨Ô쿪·¢ÊÊºÏÆäÌØÊâÐèÒªµÄ²úÆ·¡£¡£¡£¡£¡£¡£

  01

12´ç

»¯Ñ§»úеÑÐÄ¥»ų́

AMAT 300 CMP

¶Ô12´ç¾§Ô²½øÐл¯Ñ§»úеÑÐÄ¥¡£¡£¡£¡£¡£¡£

 

02  

̨½×ÒÇ

KLA P-7

¶Ô8´ç/12´ç

wafer dishing/erosion

½øÐмì²â¡£¡£¡£¡£¡£¡£

 

  03

Ô­×ÓÁ¦ÏÔ΢¾µ

AFM

¶Ô8´ç/12´ç wafer±í±íÃèÄ¡½øÐÐɨÃè¡£¡£¡£¡£¡£¡£

04  

Ñõ»¯ÎïĤºñÒÇ

nano spec ¢ò

¶Ô8´ç/12´ç oxide waferºñ¶È½øÐÐÁ¿²â¡£¡£¡£¡£¡£¡£

  05

½ðÊôĤºñÒÇ

napson RG-300

¶Ô8´ç/12´ç copper/tungsten wafer

ºñ¶È½øÐÐÁ¿²â¡£¡£¡£¡£¡£¡£

06  

12´ç¾§Ô²È±µãɨÃè»ú

AMAT 300 SEM review

¶Ô12´ç¾§Ô²È±µã½øÐÐreview¡£¡£¡£¡£¡£¡£

  07

12´ç¾§Ô²È±µã¼ì²â»ú

KLA 300 SP2

¶Ô12´ç¾§Ô²½øÐÐȱµã¼ì²â¡£¡£¡£¡£¡£¡£

08  

8´ç

»¯Ñ§»úеÑÐÄ¥»ų́

MAT 200 CMP

¶Ô8´ç¾§Ô²½øÐл¯Ñ§»úеÑÐÄ¥¡£¡£¡£¡£¡£¡£

 

 

 

 

¹Ø¼ü´Ê£º ǿǿÁªÊÖ£¡ga»Æ½ð¼×ƽ̨ÕýʽÉÏÏßICMtia½áºÏ·ÖÎö¼ì.²âÓë¼¼ÊõºÏ×÷·þÎñƽ̨

ÓйØ×ÊѶ

ýÌ屨·

ÆóÒµÎÄ»¯

¡¾ÍøÕ¾µØÍ¼¡¿¡¾sitemap¡¿